- All sections
- G - Physics
- G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; materials therefor; originals therefor; apparatus specially adapted therefor
- G03F 1/84 - Inspecting
Patent holdings for IPC class G03F 1/84
Total number of patents in this class: 562
10-year publication summary
34
|
47
|
48
|
49
|
67
|
53
|
59
|
43
|
44
|
19
|
2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
Owner |
All patents
|
This class
|
---|---|---|
Carl Zeiss SMT GmbH | 2646 |
110 |
ASML Netherlands B.V. | 6816 |
67 |
KLA-Tencor Corporation | 2574 |
51 |
Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
37 |
Hoya Corporation | 2822 |
30 |
KLA Corporation | 1223 |
28 |
Samsung Electronics Co., Ltd. | 131630 |
20 |
ASML Holding N.V. | 542 |
17 |
NuFlare Technology, Inc. | 770 |
16 |
Shin-Etsu Chemical Co., Ltd. | 5132 |
12 |
Carl Zeiss SMS Ltd. | 44 |
12 |
LaserTec Corporation | 75 |
9 |
Nikon Corporation | 7162 |
8 |
Bruker Nano, Inc. | 334 |
7 |
Kioxia Corporation | 9847 |
7 |
Applied Materials Israel, Ltd. | 549 |
6 |
Carl Zeiss AG | 855 |
6 |
KLA-Tencor Technologies Corporation | 346 |
6 |
Changxin Memory Technologies, Inc. | 4732 |
6 |
Paul Scherrer Institut | 299 |
5 |
Other owners | 102 |